The Electrostatic Chucks (ESC) is a tool that clamps an object with the force generated between the electrode and the object by applying a voltage to the electrode. There are two different types of electrostatic clamping methods. One is Coulomb force type that utilizes an insulator as a dielectric material, and the other is Johnson-Rahbek force type that utilizes an attractive force induced by dielectric polarization caused by minute electric current flow across the boundary between an object and a dielectric material. ESCs which are widely used for wafer processing (etching, CVD, PVD, Ashing), FPD Process etc.
Electrostatic Chucks (ESCs) Market Size, Manufacturers, Supply Chain, Sales Channel and Clients, 2021-2027
